Tencor Sonogage 200

F.E.I. Quanta 200 FEG SEM Field Emission Gun Scanning Electron Microscope

CAMBRIDGE NANOTECH SAVANNAH S200 ALD ATOMIC LAYER DEPOSITION SYSTEM

Perkin Elmer Sputtering System 2400 - 8L Load Lock Sputter Deposition Coater

JEOL JBX-6300FS Electron Beam Lithography System

Wafer Carrier: 4-12 inch Si wafer with 150-250um pockets