SemiStar provides  the following PECVD ALD at complete, working, functional test or refurbished condition with OEM specifications, warranty and installation (optional).

• SAVANNAH S200-ALD ATOMIC LAYER DEPOSITION SYSTEM

• PlasmaLab 80 Plus

• Plasmalab 80+ DPCVD

• PlasmaTherm 790

• PlasmaTherm 720

• PlasmaTherm 700

• STS PECVD