SemiStar provide the following RIE,ICP DRIE Bosch Process at complete, working, functional test or refurbished condition with OEM specifications, warranty and installation (optional). ​​

• PlasmaTherm 790 RIE, 2 sets

• PlasmaTherm 720

• Oxford 133 RIE, 2 sets

• OXFORD 100 RIE

• SAMCO RIE 10 NR

• STS ICP Multiplex, 4 sets

• STS ICP Bosch Process ,3 sets

• STS ICP HRM, 2 sets