Tencor M-gage 300 Thin Film Thickness Measurement

Location: USA

Tool Name & Model: Tencor M-gage 300 Sheet Resistance Measurement System (50-03000)

Description: The M-Gage 300 measures sheet resistance in ohms per square or miliohms per square on an up to 6” wafer. If specific resistivity is known, the thickness of the deposited film layer can be computed from the sheet resistance measured. It’s a non-contact measurement instrument which is taking by Eddy Current. The Digital Data Converter will perform this computation automatically. On both instruments the choice of measurement data is easily switch selectable, as is the choice of units. When used with the Digital Data Converter and printer, all measurement information is printed automatically.

Tencor M-gage 300 Sheet Resistance Measurement System (50-03000)

Maker: Tencor (Right Now is KLA-Tencor)

Wafer Size: 2”- 6”, manual load

S/N: 0989-0591

Configuration:

Tester with Display
150mm 5 points optical encode disk
DDC (Digital Data Converter, Model Number: 20-03030)
Printer (Optional)

Typical Specifications:

· Measurement range

Ω/sq range 1 Ω/sq -1,999 Ω/sq
mΩ/sq range 1 mΩ/sq -1,999 mΩ/sq
Film Thickness, calculated by DDC: 100Å min. ~ 270KÅ (when the Resistivity is 2.7µΩ-cm)
Sheet Resistance Repeatability. Total repeatability is the standard deviation (σ) percent of mean value, ±1 count:
1 to 100 mΩ/sq, Ω/sq σ/ave <±0%;
100 to 500 mΩ/sq, Ω/sq σ/ave <±0%;
500 to 1000 mΩ/sq, Ω/sq σ/ave <±0%;
1000 to 1999 mΩ/sq, Ω/sq σ/ave <±0%.
Power Requirements: 110Vac, 50-60Hz, <15A
Display: 3 ½ Digit LED display, autoranges over three decades
Shipping Weight: 7 kg (15.5 lbs)
Dimensions: Tester: 24cm (9.5″)W x 19cm (7″)H x 39cm (15.5″)D

Condition: Used. We sell it at complete, working condition. Buyer is responsible for actual shipping, and insurance charges.

Price: Pls email us with your company information and RFQ in detail.

Price Term: Ex-works

Packaging: Included

Installation and training: Optional at extra cost.

Payment Term: 100% against PO

Warranty:3 months

Lead time: 4 to 6 weeks after payment

Valid Time: Subject to prior sale without notice. Appreciate your time.

$17,500.00

Quantity