STS PRO ICP Etcher
STS PRO ICP Etcher, Located in Morgan Hill,CA,USA
The system was fully operational prior to deinstallation in a Fab in Silicon Valley.
Process pump: Edwards IH80 or equivalent (not included, optional at extra cost)
Leybold Turbo is on the chamber and a Varian scroll pump is used on the load lock.
Gases ran were N2, O2, Cl3 and Argon
This system runs 2” wafers on a pallet that holds 4 wafers. Loaded one at a time.
Clamp type: SEMCO ESC Clamp Type
Max wafer size: 2 inch and 4 inch. Capable for 6", 8" at extra cost.
Chamber: Single
Model number and/or a shot of the serial plate. MP0607
Vintage 2008
Process before deinstallation : InP etch process
Price Term: AS IS,WHERE IS
Options: We can also sell it at extra cost at (1) Complete, Working, functional test; (2) Refurbished condition with warranty . Pls contact us for detail. Appreciate your time.