STS PRO ICP Etcher

STS PRO ICP Etcher, Located in Morgan Hill,CA,USA

The system was fully operational prior to deinstallation in a Fab in Silicon Valley.

Process pump: Edwards IH80 or equivalent (not included, optional at extra cost)

Leybold Turbo is on the chamber and a Varian scroll pump is used on the load lock.

Gases ran were N2, O2, Cl3 and Argon

This system runs 2” wafers on a pallet that holds 4 wafers. Loaded one at a time.

Clamp type: SEMCO ESC Clamp Type

Max wafer size: 2 inch and 4 inch. Capable for 6", 8" at extra cost.

Chamber: Single

Model number and/or a shot of the serial plate. MP0607

Vintage 2008

Process before deinstallation : InP etch process

Price Term: AS IS,WHERE IS

Options: We can also sell it at extra cost at (1) Complete, Working, functional test; (2) Refurbished condition with warranty . Pls contact us for detail. Appreciate your time.

$150,000.00

Quantity