STS MULTIPLEX ICP Bosch Process-4inch

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Model:  STS MULTIPLEX ICP
Category:  DRIE ICP
Original Equipment Manufacturer: Surface Tech Sys ( STS )
Condition: Used, Complete, working condition. We sell it at Refurbished and fully tested condition.
Vintage: 2000
Location: Nanjing,China
Valid Time: Subject to prior sale
Warranty: 6 months for  for the Refurbished and fully tested condition.
Installation and training: Available at extra charge for the Refurbished and fully tested condition
Service Contract: Available at extra charge for the Refurbished and fully tested condition
Info on the system: (Detail)
Process Type:Polymers
Gas box type:onboard
Gas line: C4F8 200sccm、 SF6 200sccm、O2 100sccm、Ar 50sccm、CHF3 100sccm、CF4 100sccm、CO2 100sccm
System Type:Multiplex ICP
Type of loadlock:Single Wafer Loadlock
Process Modules:1 unit Modules :ASE
Electronics Rack Location:Standard layout proposed
Low electrode Chiller:Affinity RWA-012
Pumps and pumping lines: leybold Turbo Pump
Chamber Backing Pump:Edwards iH80
Loadlock Pump:Varian TS600
Generators : ENI ACG-10B