Plasmatherm SLR 720 RIE Etcher

Model: Plasmatherm SLR 720 RIE Etcher

Category: Etch RIE ICP

Original Equipment Manufacturer: PlasmaTherm

Gases: O2 50 sccm; CHF3 200 sccm; SF6 200 Sccm; CF4 100 sccm .

O2 50 sccm; He 100 sccm; CL2 100 sccm; BCL3 100 sccm

All are MKS MFCs.

EOP: SC technology inc Delta laser head DES-200LPT DES3320

RF power products RF5S 500w 13.56Mhz

HP 919 hot cathode controller

Condition: Used, Complete, working condition in a Fab in USA in 2017. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge.

Valid Time: Subject to prior sale

Lead Time: Ready to go. 8 to 10 weeks for the Refurbished and fully tested condition.

Location: Morgan Hill, CA, U.S.A.

Warranty: No warranty for the AS IS,WHERE IS condition. 6 months for the Refurbished and fully tested condition.

Installation and training: Available at extra charge for the Refurbished and fully tested condition

Service Contract: Available at extra charge for the Refurbished and fully tested condition

$65,000.00

Quantity