Lam Research Lam AutoEtch 590 Plasma Etch

Model: Lam AutoEtch 590
Original Equipment Manufacturer:Lam Research
Condition: Complete, Working Condition, fully tested before shipping by seller. New PC controller with touch Screen Monitor, 6 gas lines with 5 MFC, ENI OEM-12A RF Generator, Motorized wafer ARM movement with controller.
Wafer Size: 4 and 6 inch configuration without hardware change.
Valid Time: Subject to prior sale
Lead Time: 10-12 weeks for fully tested condition 
Location: Morgan Hill, CA, U.S.A.
Warranty: 3 months non-consumable parts warranty 
Installation and training: Available at extra charge for refurbished condition
Service Contract: Available at extra charge