CPA S-Gun Sputter Deposition / Sputter-Gun System (3 S-Guns)

CPA S-Gun Sputter Deposition / Sputter-Gun System (3 S-Guns)
 
Metals/Gases Used: TiW, W5Si3, Au, Argon, Nitrogen.
 
Wafer Size: 3 inch, 4 pieces per run.
Sloan S-Guns: DC magnetron, 3 for 3 metals. We have a few used target holders coming with the system. The target is a Ring. The typical dimensions are 3 1/8" OD x 0.930" tall with an 1/8" wall.
 
Pls contact us for more info if necessary. Appreciate your time!
 
It was from a Continuing Operations Wafer Processing Fab in Bay Area,CA USA on 12/10/2020. It was complete, working.  System was purged of all contaminates, decommissioned, and moved to our facility in Morgan Hill,CA USA.
 
We sell it at AS IS. 
 
Complete, working, functional test is available at extra cost.