AG Associates Heatpulse 4100S Rapid Thermal Annealing
Model: Heatpulse 4100S
Category: RTP – Rapid Thermal Processing
Original Equipment Manufacturer: AG Associates
Condition: Used, Complete, working condition. Fully Refurbished and Tested by seller
Valid Time: Subject to prior sale
Lead Time: 16-24 weeks
Location: Silicon Valley, CA, U.S.A.
Warranty: 180 days non-consumable parts,EXWORKS.
Others: Stainless Steel chamber (No chamber corrosion issues) and double O Ring front flange(For O2 sensitive processes).
Installation and training: Available at extra charge
Service Contract: Available at extra charge
AG Associates Heatpulse 4100S Rapid Thermal Processing equipment description
The AG Associates Heatpulse4100S rapid thermal anneal system contains a subsystem for each of the following:
• Electronics (including a dedicated microprocessor)
• Mass-flow-controlled gas handling
• Cooling
• ULPA filtration
• Mechanical assemblies